Although it's Euro/Westerncentric, Georg Iggers's Historiography in the Twentieth Century: From Scientific Objectivity to the Postmodern Challenge is an excellent survey of the evolution of professional history from its mid-nineteenth century beginnings through the late 1990s. Iggers also wrote a survey of German historiography The German Conception of History: The National Tradition of Historical Thought from Herder to the Present that's also worth looking into.

For the American context, That Noble Dream: The 'Objectivity Question' and the American Historical Profession by Peter Novick covers the evolution of history writing in the American academy. It's a bit of a slog at points and Novick does not shy away from condemning what he saw as the Balkanization of the historical discipline starting in the 1960s, which at times dips into churlishness on Novick's part. Nevertheless, That Noble Dream is a very enlightening read even if you do not agree with Novick's fetish for a master narrative.

Finally, the publisher Wiley has a series Contesting the Past which are large scale surveys of historical debate around controversial issues or events.

Inventing the Middle Ages by Norman F. Cantor

Atlantic History: Concept and Contours by Bernard Bailyn

The Nazi Dictatorship: Problems and Perspectives of Interpretation by Ian Kershaw

are all good books I've read that deal with the development of historiography. I haven't read any book on the development of history as a discipline or or historiography writ large but if you're interested in the historiography of a particular subject or time period I'm sure we could help. But the answer is, yes, there are histories of historiography of this or that sub-field or issue.

Bit late in the day, but Evan's "In Defence of History" and Bentley's "Modern Historiography: An Introduction" have always been my go-to texts; though they may be a bit UK-centric.

Grafton's "The Footnote: A Curious History" covers less breadth of subject, but is possibly the most accessible and entertaining of the three.