The most famous single Nazi deserter was Rudolf Hess, who was Hitler's deputy Fuhrer. On May 10th 1941, Hess flew a Bf 110 to Scotland, where it was shot down, after Hess parachuted from the plane. He tried to open peace negotiations with the British government, but was soon put into a prisoner of war camp.
Hess apparently acted alone. His action took Hitler by surprise and was quickly disavowed. After the war ended, Hess was put on trial at Nuremberg, along with nineteen other high ranking Nazis. Hess was convicted of crimes against peace and sentenced to life in Spandau prison in West Germany. Hess did sign off on laws in pre war Germany that progressively stripped away the civil rights of people that the Nazis thought were unfit to live, but he had defected to Scotland a year before the Final Solution began. Based on his actions before May 10th 1941, there is no reason to think Hess would have tried to stop the Final Solution, had he still been the deputy Fuhrer in 1942. Soviet opposition in the 1960s prevented Hess from being released from prison and he outlived all the other top Nazis by a wide margin. He finally died in 1987 at the age of 93.
Souces: Albert Speer "Private Diaries" and William Shirer "The rise and fall of the Third Reich"