Scans here, but it is a longhand manuscript, so not particularly easy to read.

There are published transcribed versions:

• Hooke, Robert (1935). Robinson, H. W.; Adams, W. (eds.). The Diary of Robert Hooke, M.A., M.D., F.R.S., 1672–1680. London: Taylor & Francis.

there is also a recent version that may be a transcription of the diary or might be more a commentary, it is self-published and there is little information available on it.

• Nichols, Richard. The Diaries of Robert Hooke, the Leonardo of London, 1635-1703. Book Guild, 1994.